LAM 810-102361-222 segment submodule

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LAM 810-102361-222 segment submodule

 

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    LAM 810-102361-222 segment submodule
    summary
    LAM 810-102361-222 is a segment submodule produced by LAM Research for use in etching machines. It has the following characteristics:
    High precision: etching accuracy can reach ± 0.1 μ M
    High repeatability: Etching repeatability can reach up to 3 σ
    High efficiency: etching rate can reach 10 μ M/min
    High reliability: adopting industrial grade design, with an MTBF of up to 500000 hours
    Easy to use: supports autofocus and calibration

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